Work

Ultrasound barrier based on packaged micromachined membrane resonators

Year: 2005

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.1995.472599

Authors: M. Hornung, R. Frey, O. Brand, H. Baltes, C. Hafner

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2540345358

FWCI:

Cites: 6

Cited by: 9

Related to: 10