High frequency micromechanical piezo-on-silicon block resonators
Year: 2004
Type: conference-paper
Authors: S. Humad, R. Abdolvand, G.K. Ho, G. Piazza, F. Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2547259278