The chemistry and application of nonchemically amplified (non-CA) chain-scission resists
Year: 2016
Type: book-chapter
Source: Frontiers of nanoscience
Author: Andrew K. Whittaker
Institution: The University of Queensland
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2560550992