A low temperature IC compatible process for fabricating surface micromachined metallic microchannels
Year: 2002
Type: conference-paper
Authors: I. Papautsky, A.B. Frazier, H. Swerdlow
Institution: University of Utah
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: University of Utah
OpenAlex ID: W2561617245