Work

Physics of corrosion-resistant Mg/SiC multilayer coatings for EUV sources

Year: 2015

Type: conference-paper

Source: DIGITAL.CSIC (Spanish National Research Council (CSIC))

Authors: Régina Soufli, Mónica Fernández-Perea, Chaska C. Walton, Manuela Vidal-Dasilva, John C. Robinson, Sherry L. Baker, Jennifer Alameda, Luís Rodríguez de Marcos, Jose A. Méndez, Juan I. Larruquert, E. M. Gullikson

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2562237300

FWCI:

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