Work

Film Bulk Acoustic Wave Resonators composed of Pt/PbTiO_3/Ir/SiO_2 structure

Year: 2000

Type: conference-paper

Source: Proceedings of the Society Conference of IEICE

Authors: Ken Yoshida, K. Misu, K. Ibata, A. Yamada, C. Maeda

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2571357049

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