Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps
Year: 2005
Type: conference-paper
DOI: 10.1117/12.590750
Authors: Pejman Monajemi, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2575099721