Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications
Year: 2017
Type: article
Abstract: Zinc Selenide (ZnSe) is a promising mid-infrared waveguide material with high refractive index and wide transparency. Optical quality ZnSe thin films were deposited on silicon substrates by RF sputtering and thermal evaporation, and characterized and compared for material and optical properties. Evaporated films were found to be denser and smoother than sputtered films. Rib waveguides were fabricated from these films and evaporated films exhibited losses as low as 0.6 dB/cm at wavelengths between 2.5 µm and 3.7 µm. The films were also used as isolation/lower cladding layers on Si with GeTe4 as the waveguide core and propagation losses were determined in this wavelength range.
Source: Optical Materials Express
DOI: 10.1364/ome.7.000712
Institution: University of Southampton
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,843
OpenAlex ID: W2585865999
