Work

Research on Microelectronics and Nanotechnologies at Georgia Tech

Year: 2016
Type: article
Abstract: The presentation provides an overview of the nanotechnology fabrication resources available at Georgia Tech’s Institute for Electronics and Nanotechnology (IEN) and highlights some of the research activities enabled by them. The IEN cleanrooms and characterization labs are part of the NSF-funded National Nanotechnology Coordinated Infrastructure (NNCI) and are used by almost 700 researchers on an annual base. Supported activities range from materials and process development to micro/nano device and system integration.
Author: Oliver Brand
Language: English
Open Access status: green
OpenAlex ID: W2586727527
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