Work

Development of Hybrid MEMS/FIB Processes and Applications of Three-pronged Active Nanotweezers For Manipulation of Nano Objects

Year: 2006

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-983-0983-ll08-09

Authors: Xuefeng Wang, Chang Liu

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2587110044

FWCI:

Cites: 7

Cited by:

Related to: 10