An electrostatic MEMS scanner with in-plane and out-of-plane two-dimensional scanning capability for confocal endoscopic in vivo imaging
Year: 2017
Type: conference-paper
Authors: Haijun Li, Xiyu Duan, Thomas D. Wang
Institution: University of Michigan
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2592015681
