Work

Fabrication of nanoscale structures with nanometer resolution and surface uniformity

Year: 2017

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2017.7863494

Authors: Farnaz Niroui, Mayuran Saravanapavanantham, Timothy M. Swager, Jeffrey H. Lang, Vladimir Bulovic

Institution: Massachusetts Institute of Technology

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2593441086

FWCI:

Cites: 8

Cited by: 1

Related to: 10