Work

A 0.5 mm2 7-mhz capacitive bulk acoustic wave gyroscope in (100) silicon with large dynamic range

Year: 2017

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2017.7863330

Authors: Amir Rahafrooz, Diego E. Serrano, Duane Younkin, Shin Nagpal, Ijaz Jafri, Farrokh Ayazi

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2593811457

FWCI: 1.935

Cites: 5

Cited by: 6

Related to: 10