Work

Distributed Lamé mode resonators for temperature-stable high frequency mems oscillators

Year: 2017

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2017.7863556

Authors: Anosh Daruwalla, Chang-Shun Liu, Haoran Wen, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2594862428

FWCI: 2.321

Cites: 9

Cited by: 7

Related to: 10