Work

Three-coil inductively coupled plasma (ICP) source with individually controlled coil currents supplied from a single power generator

Year: 2013

Type: article

Source: Bulletin of the American Physical Society

Authors: L. Dorf, Shahid Rauf, Jonathan Liu, Jason Kenney, Steven Lane, Andrew Nguyen, K. Ramaswamy, Ken Collins

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2599391503

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Related to: 20