Work

A New Design for Suspension of Linear Microactuators

Year: 1994

Type: conference-paper

Source: ASME International Mechanical Engineering Congress and Exposition (IMECE)

DOI: 10.1115/imece1994-0490

Authors: L. Saggere, Sridhar Kota, S. B. Crary

Institutions: University of Michigan, University of Illinois Chicago

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2600258665

FWCI:

Cites:

Cited by: 15

Related to: 10