Work

MEMS Device Failure Analysis: Simulation and the Road Ahead

Year: 2007

Type: article

Source: EDFA Technical Articles

DOI: 10.31399/asm.edfa.2007-4.p048

Author: Colin Drummond

Institution: ASM International

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2607000671

FWCI:

Cites:

Cited by: 1

Related to: 10