Processing Methods for Selected Area Film Deposition and Preparation on Microsensor Platforms Using Thermal and Potential Control
Year: 1999
Type: article
Authors: R.M. Walton, C. E. Kendrick, Balaji Panchapakesan, Don L. DeVoe, Richard E. Cavicchi, S. Semancik
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W260996938