Development of a 3-omega thermal conductivity measurement system for thin dielectric films with experimental validation
Year: 2017
Type: conference-paper
Abstract: The 3-omega technique was developed 1990s for the measurement of thermal conductivity and diffusivity. The technique uses an AC power supply with frequency of omega and a lock-in amplifier to capture the voltage signal with frequency of 3-omega. The thermal conductivity can be calculated with high accuracy through detailed analysis of the signal combined with a physical model of the system. In order to guarantee high accuracy of the measurement of systems of unknown thermal conductivity, it is important to validate the accuracy of the 3-omega system with a known material. Several sets of experimental data of the thermal conductivity of a 300nm silicon nitride film were collected. By comparing the measurement result with data found from the literature , the agreement verifies the accuracy of the system. This system will be used in future studies to measure thermal conductivity, thermal diffusivity, heat spreading and thermal boundary conductance of nanoscopic films, layered structures, and other nanostructured materials.
Author: Daxi Zhang
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2611491998