Work

Controlling ultrashallow junction formation through surface chemistry

Year: 2005

Type: article

Source: 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase

Authors: Edmund G. Seebauer, Ramakrishnan Vaidyanathan, Kapil Dev, Charlotte T. M. Kwok, Richard D. Braatz

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2613682487

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