Work

1-2 Fabrication of metalized movable microstructures using two-photon microfabrication : Electroless plating of 3-D polymeric microstructures and release of movable microstructures by laser Ablation

Year: 2011

Type: conference-paper

Abstract: In this study, we propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of electroless plating and laser ablation. In this method, a polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond plused laser. As a result, a metalized freely movable micropart restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3-D microrotors by optimizing the experimental conditions of both electroless copper plating and laser ablation.

Source: The Proceedings of the Symposium on Micro-Nano Science and Technology

DOI: 10.1299/jsmemnm.2011.3.5

Authors: Takashi Ikegami, John T. Fourkas, Shoji Maruo

Institutions: Yokohama National University, University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W2671230201

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