Modulating the resistivity of MoS2 through low energy phosphorus plasma implantation
Year: 2017
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.4989829
Institutions: University of Florida, IMEC
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: Applied Materials
OpenAlex ID: W2699719340
