Work

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Year: 2017

Type: conference-paper

Abstract: We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2270596

Authors: Martin Hammerschmidt, Martin Weiser, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven Burger

Institutions: Zuse Institute Berlin, Physikalisch-Technische Bundesanstalt

Language: English

Topic: Numerical methods in inverse problems

Subfield: Mathematical Physics

Field: Mathematics

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2732254308

FWCI: 2.682

Cites: 15

Cited by: 9

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