A MEMS Micro-Translation Stage with Long Linear Translation
Year: 2004
Type: article
Authors: Cynthia K. Ferguson, Jennifer M. English, Gregory P. Nordin, Paul Ashley, Mustafa A. G. Abushagur
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W273381398
