Feasibility study of fully self aligned vias for 5nm node BEOL
Work
Year: 2017
Type: article
Authors Gayle Murdoch, J. Bömmels, Christopher J. Wilson, Khashayar Babaei Gavan, Quoc Toan Le +2 more
Institutions IMEC, Coventor (France)
Cites: 1
Cited by: 29
Related to: 10
FWCI: 3.342
Citation percentile (by year/subfield): 97.48
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed