Year: 2017
Type: article
Abstract: A series of five organotin carboxylates of the type [RSn(O)O2CR’]6 containing n‐butyl ligands and carboxylates ranging in size from formate to diphenylacetate were synthesized and examined by single crystal X‐ray diffraction. The crystal and packing structures of each compound were compared with regards to the steric and intermolecular forces of the varying carboxylate groups in order to aid the understanding of how these same factors relate to irradiation trends in EUV lithography of thin films. The trends found are compared to other factors that may also dictate resist formation in order to elucidate a fuller picture of the chemical transformations that occur when patterning inorganic materials.
Source: Crystal Research and Technology
Institution: University of Oregon
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2737523853