Work

etching of SiC with hydrofluoric acid in nonaqueous solvents

Year: 2014

Type: article

Authors: Jaganathan Senthilnathan, Chih‐Chiang Weng, Wen‐Ta Tsai, Yury Gogotsi, Masahiro Yoshimura

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2739656057

FWCI:

Cites: 53

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Related to: 10