Work

Nondestructive characterization of oxygen-ion-implanted silicon- on-insulator using multiple-angle ellipsometry

Year: 1988

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.341620

Authors: Pradip Dutta, George A. Candela, Deane Chandler-Horowitz, J. F. Marchiando, Martin C. Peckerar

Institutions: National Institute of Standards and Technology, United States Naval Research Laboratory, University of Maryland, College Park

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2037001760

FWCI: 1.9

Cites: 14

Cited by: 7

Related to: 10