Work

As Depth Profiling in Si Ultrashallow Junctions: Comparison of Three Different Experimental Determinations.

Year: 2009

Type: conference-abstract

Abstract: not Available.

Source: ECS Meeting Abstracts

DOI: 10.1149/ma2009-02/22/2007

Authors: Andrea Parisini, Vittorio Morandi, Jaap Van den Berg, Michael A. Reading, Damiano Giubertoni, Paul Bailey, Tim Noakes

Institutions: Institute for Microelectronics and Microsystems, University of Salford, Fondazione Bruno Kessler, Daresbury Laboratory

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W2741181272

Cites:

Cited by: 1

Related to: 10