Work

Fabrication of adaptive mirrors for extreme ultraviolet lithography

Year: 2012

Type: conference-paper

Source: University of Twente Research Information

Authors: Bayraktar, Muharrem; id_orcid 0000-0002-8339-2091, Chopra, A., Wessels, W.A., Lee, Christopher James, van Goor, F.A., Koster, Gertjan; id_orcid 0000-0001-5478-7329, Rijnders, Augustinus J.H.M., Bijkerk, Frederik

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2741410773

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