Work

Fabrication of Self-supporting Poly-Si Thermoelectric Device

Year: 2000

Type: article

Abstract: This paper describes design and experiment of a self-supporting poly-Si thermoelectric device. The device can be used for sensing element of temperature sensors, radiation sensors, and power suppliers. Thermoelectric legs are made of Au/Cr and poly-Si. The array that is connected with 10 thermoelectric legs can be realized. The device was fabricated by the MICS (Micromachine Integrated Chip Survice). Results of experiments were compared with a calculation in order to confirm the function of the proposed device.

Source: The proceedings of the JSME annual meeting

DOI: 10.1299/jsmemecjo.2000.1.0_721

Authors: Masakazu YAJIMA, Keiichirou FUKUMASU, Toshiyuki TORIYAMA, Satoshi KONISHI, Susumu SUGIYAMA

Institution: Ritsumeikan University

Language: English

Topic: Advanced Thermoelectric Materials and Devices

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W2742513125

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Related to: 10