Work

Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

Year: 2017

Type: conference-paper

Abstract: In-plane shape memory alloy (SMA) actuators operated in agonist-antagonist mode are integrated on silicon micro-grippers. The actuator elements are cut out of sheet material in a femtosecond laser ablation process. The assembly process is carried out on wafer-level, and the fixation realized by galvanic riveting. The initial deformation of the differential actuators needed to access their actuation potential is implemented during the gripper connection to energy supply.

Source: EUROSENSORS Conference (EUROSENSORS)

DOI: 10.3390/proceedings1040385

Authors: Mayra Garcés-Schröder, Lars Hecht, Anke Vierheller, Monika Leester-Schädel, Markus Böl, Andreas Dietzel

Institution: Technische Universität Braunschweig

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Funder: Deutsche Forschungsgemeinschaft

Award: G3117587416