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大ダイナミックレンジを持つ(100)シリコンにおける0.5mm~XXVII MHz容量性バルク音響波ジャイロスコープ【Powered by NICT】

Year: 2017

Type: conference-paper

Source: IEEE Conference Proceedings

Authors: Rahafrooz Amir, E Serrano Diego, Younkin Duane, Nagpal Shin, Jafri Ijaz, Farrokh Ayazi

Language: Japanese

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2745019440

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