On-Chip Ultra-High-Q Silicon Oxynitride Optical Resonators
Year: 2017
Type: article
Source: ACS Photonics
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1486297287, G900393168
OpenAlex ID: W2746362874
