傾斜電極設計を用いたナノギャップ静電容量型MEMS加速度計の衝撃保護【Powered by NICT】
Year: 2017
Type: conference-paper
Source: IEEE Conference Proceedings
Language: Japanese
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2747679504