Work

Shock-protection of nano-gap capacitive MEMS accelerometers using sloped electrode design

Year: 2017

Type: conference-paper

Source: IEEE Conference Proceedings

Authors: Jeong Yaesuk, Foster Michael, Chae Junghun, E Serrano Diego, Farrokh Ayazi

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2751961357

FWCI:

Cites:

Cited by:

Related to: 10