Kinetic pathway of the ferroelectric phase formation in doped HfO2 films
Year: 2017
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.5003918
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G6133037600
OpenAlex ID: W2757550265
