Work

Power and Technology Scaling into the 5 nm Node with Stacked Nanosheets

Year: 2017

Type: article

Source: Joule

DOI: 10.1016/j.joule.2017.10.014

Author: Terence B. Hook

Institution: IBM (United States)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W2767205086

FWCI: 32.23

Cites: 5

Cited by: 391

Related to: 10