Work

A Passive Wireless Microelectromechanical Pressure Sensor for Harsh Environments

Year: 2017

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2017.2774000

Authors: John E. Rogers, Yong-Kyu Yoon, Mark Sheplak, Jack W. Judy

Institutions: Boeing (United States), University of Florida

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: U.S. Department of Energy

Award: HIGH-TEMPERATURE SAPPHIRE PRESSURE SENSORS FOR HARSH ENVIRONMENTS

OpenAlex ID: W2771747716

FWCI: 1.82

Cites: 61

Cited by: 29

Related to: 10