Work

Dynamic metasurface lens based on MEMS technology

Year: 2018

Type: article

Abstract: In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

Source: APL Photonics

DOI: 10.1063/1.5018865

Authors: Tapashree Roy, Shuyan Zhang, Il Woong Jung, Mariano Troccoli, Federico Capasso, Daniel Lopez

Institutions: Argonne National Laboratory, Harvard University

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,750

Funders: National Science Foundation, U.S. Department of Energy, Agency for Science, Technology and Research, Air Force Office of Scientific Research