Thin films for high-resolution, 3-color lithography
Year: 2018
Type: conference-paper
DOI: 10.1117/12.2299681
Authors: Nikolaos Liaros, Adam Pranda, Hannah M. Ogden, Steven Wolf, John S. Petersen, Samuel R. Cohen, Daniel E. Falvey, Amy S. Mullin, Gottlieb S. Oehrlein, John T. Fourkas, Sandra A. Gutierrez
Institution: University of Maryland, College Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2790928627