Work

The state of the art in multicolor visible photolithography

Year: 2018

Type: conference-paper

Source: SPIE Novel Patterning Technologies

DOI: 10.1117/12.2297653

Authors: John T. Fourkas, Nikolaos Liaros, Zuleykhan Tomova, Sandra A. Gutierrez Razo, Samuel R. Cohen, Steven M. Wolf, Matthew Thum, Daniel E. Falvey, Hannah M. Ogden, Amy S. Mullin, Adam Pranda, Gottlieb S. Oehrlein, John S. Petersen

Institution: University of Maryland, College Park

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2791687331

FWCI: 1.196

Cites: 25

Cited by: 5

Related to: 10