Work

Fabrication of Cu/Cu-Ni thin film thermoelectric generator for energy harvest

Year: 2017
Type: article
Abstract: We demonstrated the fabrication of Cu/Cu-Ni thin-film thermoelectric generators for energy harvest. The device consisted of 50 pairs of Cu/Cu-Ni thermocouples. The widths of the Cu (p-type) and Cu-Ni (n-type) thermoelectric elements were 75 μm and 225 μm, respectively. The length of the both elements was 5 mm. Cu and Cu-Ni thin films were deposited on glass substrates using radio-frequency magnetron sputtering method and formed by lift-off techniques. Cu plate was connected the cold sides of the pn junctions using Ag paste. The compositions of Cu and Ni in the deposited thin films using a Cu60Ni40 alloy target were 58.5(±1.4)at% and 41.5(±0.9)at%, respectively, indicating that significant oxidation of the thin films were not observed. The generation properties of the fabricated 5 devices, which were connected in series, were evaluated. When the hot sides of the devices were heated at 55.4°C using a hot plate as a thermal source, the temperature difference of between the hot and cold sides was approximately 18°C. The open-circuit voltage and maximum power were 192 mV and 1.46 μW (0.65 mW/m2), respectively.
Language: English
Open Access status: diamond
OpenAlex ID: W2792403173
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