Work

Design of seal ring with rectangular grooves for gas isolation in Nanoimprint Lithography

Year: 2018

Type: article

Source: Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science

DOI: 10.1177/0954406218763683

Authors: Peng Wei, Ma Liuhong, Li Mengke, Zhong Yinghui, Shangguan Lei, Cai Yuwei, Duan Zhiyong

Institution: Zhengzhou University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G3599547821, G5144591157, G6351205629

OpenAlex ID: W2794763373

FWCI:

Cites: 22

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Related to: 10