Work

Epitaxially-grown thick polysilicon for baw disk resonator gyroscopes with very low dissipation

Year: 2018

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2018.8346729

Authors: Anosh Daruwalla, Haoran Wen, Ramin Mirjalili, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2798551361

FWCI: 3.836

Cites: 7

Cited by: 13

Related to: 10