Work

High-Q monocrystalline silicon carbide disk resonators fabricated using drie of thick SiC-on-insulator substrates

Year: 2018

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2018.8346726

Authors: Seung-Deok Ko, Benoit Hamelin, Jeremy Yang, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Advanced Research Projects Agency

OpenAlex ID: W2799161225

FWCI: 4.384

Cites: 14

Cited by: 14

Related to: 10