Work

P-type Al-doped Cr-deficient CrN thin films for thermoelectrics

Year: 2018
Type: article
Abstract: Thermoelectric properties of chromium nitride (CrN)-based films grown on c-plane sapphire by dc reactive magnetron sputtering were investigated. In this work, aluminum doping was introduced in CrN (degenerate n-type semiconductor) by co-deposition. Under the present deposition conditions, over-stoichiometry in nitrogen (CrN 1+δ ) rock-salt structure is obtained. A p-type conduction is observed with nitrogen-rich CrN combined with aluminum doping. The Cr 0.96 Al 0.04 N 1.17 film exhibited a high Seebeck coefficient and a sufficient power factor at 300 °C. These results are a starting point for designing p-type/n-type thermoelectric materials based on chromium nitride films, which are cheap and routinely grown on the industrial scale.
Language: English
Open Access status: hybrid
Estimated APC paid: $510
OpenAlex ID: W2800602813
FWCI: 1.399
Cites: 39
Cited by: 30
Related to: 10