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Review Article: Recommended practice for calibrating vacuum gauges of the ionization type

Year: 2018

Type: article

Abstract: This article represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.5025060

Authors: James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock

Institutions: National Institute of Standards and Technology, MKS Instruments (United States)

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: hybrid

OpenAlex ID: W2800989170

FWCI: 0.763

Cites: 46

Cited by: 17

Related to: 10