Structure, phase evolution, and mechanical properties of DC, pulsed DC, and high power impulse magnetron sputtered Ta–N films
Year: 2018
Type: article
Source: Surface and Coatings Technology
Authors: C.M. Koller, H. Marihart, H. Bolvardi, S. Kolozsvári, P.H. Mayrhofer
Institutions: TU Wien, Oerlikon (Liechtenstein), Plansee (Germany)
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Technische Universität Wien
OpenAlex ID: W2801441472