Work

A ±0.3 ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing

Year: 2018

Type: article

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/tuffc.2018.2843781

Authors: Chang-Shun Liu, Roozbeh Tabrizian, Farrokh Ayazi

Institutions: Georgia Institute of Technology, University of Florida

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

Award: G1635955495

OpenAlex ID: W2805072659

FWCI: 1.242

Cites: 19

Cited by: 56

Related to: 10